Maximum Sample Size: 10×10 cm²
Maximum Sample Height: few mm
All types of substrates, with specific concerns to avoid (cross-) contamination
Manufacturer: MBE Komponenten
Model: N/A (two versatile chambers)
Tools can be used by everybody, providing a suitable training
This process allows to deposit CIGS materials on a variety of substrates with high record efficiency
During a process, material sources (Cu, Ga, In) are heated to be vaporized. Gaseous elements transit into the chamber to reach the substrate and form a layer. Several material sources can be triggered simultaneously to deposit compounds onto the substrate surface. The deposition may be followed by specific annealing steps (in Se or S environment) in order to form desired compounds (CIGS for example).
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