Spectroscopic ellipsometer – HORIBA

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Key sample information

Maximum Sample Size: 20×20 cm²
Maximum Sample Height: 10 cm

All types of materials


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Practical information

Manufacturer: HORIBA Jobin Yvon
Model: UVISEL2

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What is it for?

This tools is for optically measuring the thickness of thin layers and deduced the optical indices (n,k).

How does it work?

A polarized light is send on the sample and the reflected light is then analyzed according to its polarization and wavelength. By using a dispersion model, a lot of materials parameters can be deduced (thickness, optical indices, roughness…).

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