SEM – ZEISS



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Key sample information

Maximum Sample Size: 15×15 cm2
Maximum Sample Height: 5 cm
Surface and cross-section measurements possible

Materials used

Conductive samples (no pre-treatment)
Nonconductive sample (pre-treatment needed)

More information about PV material.

Practical information

Manufacturer: Zeiss
Model: Merlin compact
Minimum training time to use the machine: 4 days

More information our training policy.

What is it for?

SEM: Morphological and chemical contrast images @ nanoscale
EDX: 5 cm
EBIC: Local current generated by the SEM electron beam @ nanoscale

Resolution SEM: XY <30nm
Resolution EDX: XY <50nm
EBIC: <30nm
Maximum Scan Size: 500µm x 500µm

How does it work?

SEM: Electronic gun interacts with the sample and secondary or backscattered electron are detected to provide an image. Can be destructive to organic or soft materials
EDX: X-ray photons generated locally by the SEM gun are detected and the chemical composition is deduced from the spectrum obtained
EBIC: A map of the current generated locally by the SEM gun is measured

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